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UB RISE
  • Presentations
    • 2026 Presentations
    • 2025 Presentations
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    • 2023 Presentations
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    • 2021 Presentations
  • Registration
    • Submit Poster
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Simulation-Based Analysis of Electrode Geometry Effects on Force Uniformity in Wafer Electrostatic Chucks

/ 2026, Graduate / By Raj Bharatkumar Prajapati
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